Introduction
Since high purity alumina has excellent heat resistance, abrasion resistance, plasma resistance, low dust generation, surface processing accuracy and insulation properties, high purity alumina machined parts are widely used in semiconductor equipments.
Alumina components for semiconductor manufacturing are made of high purity alumina and shaped by cold isostatic pressing, high temperature sintering and precision machining and polishing, alumina components we produced can meet the strict requirements of parts for semiconductor equipment with their features of wear resistance, corrosion resistance, low thermal expansion, insulation.
Small Components
- Alumina Screw
- Insulation Board
- Alumina End Effector
- Wafer Clamp
- Aumina Insulator
- Lift Pin
- Alumina Nozzle
Large Components
- Chamber Domes
- Chamber Liners
- Deposition Rings
- Showerheads
- Insulator Plates
- Focus Ring
- Edge Ring
OEM Manufacturing
Components can be customized according to customer’s drawings or samples.
